Om Maheshwari

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Publications (5)

• Sample-Efficient Modeling and Optimization of High-Dimensional Semiconductor Processes Using Output-Augmented Gaussian Process Regression and Dynamic Bayesian Optimization
  IEEE Transactions on Semiconductor Manufacturing 2026 DOI: 10.1109/TSM.2026.3683804
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• Unified Machine Learning Framework for Process–Device–Circuit Variability Quantification of Inner Spacer Etch in GAA FETs
  IEEE Transactions on Semiconductor Manufacturing 2026 DOI: 10.1109/TSM.2026.3701836
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• Comprehensive Study of Parasitic Capacitance in CFETs: An Analytical Perspective
  IEEE Transactions on Electron Devices 2025 DOI: 10.1109/TED.2025.3585907
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• Training-Free Parameter Extraction for Compact Device Models Using Sequential Bayesian Optimization With Adaptive Sampling
  IEEE Transactions on Electron Devices 2024 DOI: 10.1109/TED.2024.3478177
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• Parasitic Capacitance in Nanosheet FETs: Extraction of Different Components and Their Analytical Modeling
  IEEE Transactions on Electron Devices 2024 DOI: 10.1109/TED.2024.3382216
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