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Publications (10)
- Cost-Effective Fabrication of PVDF-Based MEMS Sensor With Diced Glass Microtunnel Save
- Development of self-powered PVDF based MEMS sensors for sound pressure level measurements Save
- Fabrication and reliability testing of a MEMS piezoelectric acoustic sensor for applications in harsh environments Save
- Design and optimization of piezoelectric diaphragm for self-powered acoustic sensor Save
- Cost-effective fabrication of self-powered PZT based MEMS sensor for high sound pressure level measurement Save
- MEMS piezoelectric sensor for self-powered devices: A review Save
- Design and Fabrication of Piezoelectric MEMS Sensor for Acoustic Measurements Save
- Development of MEMS Acoustic Sensor With Microtunnel for High SPL Measurement Save
- Piezoelectric Based MEMS Acoustic Sensor for Wide Frequency Applications Save
- Development of Diaphragm and Microtunnel Structures for MEMS Piezoelectric Sensors Save