Employment
Employment history is unavailable.
Education
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University of Massachusetts Amherst1990 - Present
Projects & Funding
Projects & funding information is unavailable.
Publications (4)
- Novel process integration flow of germanium-on-silicon FinFETs for low-power technologies Save
- EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer Save
- A photoacid generator integrated terpolymer for electron beam lithography applications: sensitive resist with pattern transfer potential Save
- Organic–inorganic hybrid photoresists containing hexafluoroantimonate: design, synthesis and high resolution EUV lithography studies Save