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Publications (24)
- Assessment of the Mask Composed of Sputtered Si Thin Film and Positive Photoresist for Wet Bulk Micromachining of Borofloat Glass Save
- A Study on Wet Anisotropic Etching of Si{100} in NH4OH Based Solutions: The Effect of Surfactant Concentration on the Etching Characteristics Save
- All-printed WO3 films on an Ag-interdigitated electrode derived from aqueous screen-printable inks for room-temperature ammonia gas detection Save
- Fabrication of Microchannels in Borofloat Glass Wafer Using Low-Cost Wet Bulk Micromachining Save
- Fabrication of the microfluidic channels in silicon wafers using isotropic wet etching method: the impact of the composition of HNA solution on etching Save
- Investigation on the etching characteristics of Si{100} in low concentrations of TMAH solutions for MEMS-based sensors Save
- Wet bulk micromachining of Borofloat glass towards the fabrication of through-holes in different concentrations of hydrofluoric acid Save
- Fabrication of microchannels and through-holes in Borofloat glass using Cr thin film with positive photoresist as the masking layer through wet etching Save
- Exploring the protection of spray-pyrolysed tungsten oxide hydrophobic coating on stainless steel in a marine environment Save
- Detection of ethanol gas at room temperature by In2O3-based screen-printed films fabricated through particle-free aqueous solution combustible inks Save