SEETHARAMAN RAMACHANDRAN

Employment

• LAM Research Corp Engineering Director
  2007 - Present

Education

• University of Texas at Dallas PhD
  2002 - 2007

Projects & Funding

Projects & funding information is unavailable.

Publications (7)

• Study of layered diamond like carbon and PECVD fluorocarbon films for ultra low dielectric constant interlayer dielectric applications
  Journal of Materials Research 2016 DOI: 10.1557/jmr.2016.97
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• Study and optimization of PECVD films containing fluorine and carbon layered with diamond like carbon films as ultra low dielectric constant interlayer dielectrics
  Materials Research Society Symposium Proceedings 2013 DOI: 10.1557/opl.2013.37
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• Durable diamond-like carbon templates for UV nanoimprint lithography
  Nanotechnology 2008 DOI: 10.1088/0957-4484/19/10/105302
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• Forming carbon nanotube composites by directly coating forests with inorganic materials using low pressure chemical vapor deposition
  Thin Solid Films 2008 DOI: 10.1016/j.tsf.2008.06.064
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• Nanofabrication of diamond-like carbon templates for nanoimprint lithography
  Materials Research Society Symposium Proceedings 2007
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• Deposition and patterning of diamondlike carbon as antiwear nanoimprint templates
  Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 2006 DOI: 10.1116/1.2363409
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• Filling of carbon nanotube forests grown by atmospheric pressure PECVD
  2006 IEEE Nanotechnology Materials and Devices Conference, NMDC 2006 DOI: 10.1109/NMDC.2006.4388865
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