Anil Kurhekar

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Publications (9)

• On stiction mechanism of bulk micro-machined micro-mechanical structures
  2018 DOI: 10.1063/1.5047965
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• Thermal annealing improves electrical properties of hetero-junction diode
  2018 DOI: 10.1063/1.5047992
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• On calculation of elastic properties in silicon and germanium single crystals
  2017 4th International Conference on Electronics and Communication Systems (ICECS) 2017 DOI: 10.1109/ecs.2017.8067870
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• Out of the plane curling effect in MEMS cantilever beam
  2017 4th International Conference on Electronics and Communication Systems (ICECS) 2017 DOI: 10.1109/ecs.2017.8067871
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• Design and Fabrication of Bulk Micro-machined, High Resilience, High-Q, High Tilt Angle, Low Driving Voltage, Flexure Beam Micro-mirrors on Mono-crystalline Silicon
  Silicon 2015 DOI: 10.1007/s12633-014-9259-2
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• Growth and Characterization of High-Quality Dielectric Sputtered Zinc Oxide Films from the First Principle
  Brazilian Journal of Physics 2014 DOI: 10.1007/s13538-014-0251-5
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• Step height measurement of surface-functionalized micro-machined micro-cantilever by scanning white light interferometry
  International Nano Letters 2013 DOI: 10.1186/2228-5326-3-33
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• Spectroscopic-ellipsometric study of native oxide removal by liquid phase HF process
  International Nano Letters 2013 DOI: 10.1186/2228-5326-3-10
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• Geometrical parameters measurement of surface functionalized micromachined micro-cantilever using optical method
  International Nano Letters 2012 DOI: 10.1186/2228-5326-2-25
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