Fabien Deprat

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Publications (14)

• Simulation of Interference‐Enhanced Raman Amplification for Advanced Microelectronic Applications
  physica status solidi (a) 2026 DOI: 10.1002/pssa.202501030
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• A benchmark of profiling techniques for the examination of silicon with low dopant concentrations across wide fields of view
  Semiconductor Science and Technology 2025 DOI: 10.1088/1361-6641/ae0e46
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• (Invited) Epitaxial Process Development and Challenges for Advanced SiGe BiCMOS
  ECS Meeting Abstracts 2024 DOI: 10.1149/MA2024-02322318mtgabs
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• Benchmarking of HCl-Based Cyclic Deposition / Etch (CDE) and Single Deposition / Etch (DE) Processes for Selective Epitaxial Growth of SiGeC:B Films
  ECS Meeting Abstracts 2024 DOI: 10.1149/MA2024-02322367mtgabs
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• Boron Delta-Doping in Si : B Stacks By RP-CVD Epitaxy
  ECS Meeting Abstracts 2024 DOI: 10.1149/MA2024-02322354mtgabs
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• Nucleation and Growth Mechanisms of Polycrystalline Sige-Based Materials By Chemical Vapor Deposition at Reduced Pressure
  ECS Meeting Abstracts 2024 DOI: 10.1149/MA2024-02322373mtgabs
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• (Invited) Epitaxial Process Development and Challenges for Advanced SiGe BiCMOS
  ECS Transactions 2024 DOI: 10.1149/11402.0093ecst
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• Benchmarking of HCl-Based Cyclic Deposition / Etch (CDE) and Single Deposition / Etch (DE) Processes for Selective Epitaxial Growth of SiGeC:B Films
  ECS Transactions 2024 DOI: 10.1149/11402.0333ecst
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• Boron Delta-Doping in Si : B Stacks By RP-CVD Epitaxy
  ECS Transactions 2024 DOI: 10.1149/11402.0241ecst
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• Relaxation Dynamics of Heteroepitaxial Films on Mesa-Strip Designs
  2023 DOI: 10.2139/ssrn.4376090
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