DR
Dipankar Roy
Clarkson University, Cornell University, Rensselaer Polytechnic Institute
0000-0002-8351-5493
Employment
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Clarkson University Professor/Chair1989 - Present
Education
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Cornell University Postdoc1986 - 1989
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Rensselaer Polytechnic Institute PhD1981 - 1986
Projects & Funding
Projects & funding information is unavailable.
Publications (17)
- Mitigating Galvanic Corrosion of Molybdenum Diffusion Barriers in Chemical Mechanical Planarization of Copper Interconnects: A Case Study Using Imidazole in a Citrate Slurry of Neutral pH Save
- Structure–Transport Relationships in Ionic Liquids: Effects of Cation Architecture and Ether Functionalization Save
- Tribo-Electrochemical Characterization of Brush-Scrubbed Post-CMP Cleaning: Results for Tartrate-Supported Removal of Residual Oxides from Copper Films Save
- Tribo-Electrochemical Considerations for Assessing Galvanic Corrosion Characteristics of Metals in Chemical Mechanical Planarization Save
- Tribo-Electrochemical Mechanism of Material Removal Examined for Chemical Mechanical Planarization of Stainless-Steel Using Citrate Buffer as a Complexing Agent Save
- Mechanisms of Chemically Promoted Material Removal Examined for Molybdenum and Copper CMP in Weakly Alkaline Citrate-Based Slurries Save
- Experimental Strategies for Studying Tribo-Electrochemical Aspects of Chemical–Mechanical Planarization Save
- Electrochemistry of copper post-CMP cleaning examined in combination with brush-scrubbing in a malonic acid solution Save
- Tribo-Electrochemistry of Post-CMP Cleaning: Results for Co and Cu Wafer Films Brushed in Different Solutions Save
- Probing the Mechanisms of Metal CMP Using Tribo-Electroanalytical Measurements: Results for a Copper/Malonate System Save