Pallavi Sharma

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Publications (10)

• Atomization of High Viscous Liquids Using a MEMS Vibrating Mesh With Integrated Microheater
  Journal of Microelectromechanical Systems 2023 DOI: 10.1109/JMEMS.2023.3282811
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• Unlocking AlN Piezoelectric Performance with Earth-Abundant Dopants
  Advanced Electronic Materials 2023 DOI: 10.1002/aelm.202201187
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• Investigation of droplet size distribution for vibrating mesh atomizers
  Journal of Aerosol Science 2022 DOI: 10.1016/j.jaerosci.2022.106072
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• Vibration analysis of MEMS vibrating mesh atomizer
  Journal of Micromechanics and Microengineering 2022 DOI: 10.1088/1361-6439/ac69ad
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• EFFECT OF SF6 AND C4F8 FLOW RATE ON ETCHED SURFACE PROFILE AND GRASS FORMATION IN DEEP REACTIVE ION ETCHING PROCESS
  ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) 2022 DOI: 10.1115/IMECE2022-92967
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• Spray Cooling Using Silicon Vibrating Mesh Atomizer
  SSRN 2022
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• Vibrating Mesh Atomizer for Spin-Spray Deposition
  Journal of Microelectromechanical Systems 2021 DOI: 10.1109/JMEMS.2021.3092966
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• Development and characterization of confocal sputtered piezoelectric zinc oxide thin film
  Vacuum 2021 DOI: 10.1016/j.vacuum.2020.109930
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• Spin-Spray Deposition of Spin on Glass Using MEMS Atomizer
  2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) 2021 DOI: 10.1109/mems51782.2021.9375169
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• Overview of Fault Tree Analysis
  International Journal of Engineering Research and 2015 DOI: 10.17577/ijertv4is030543
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