MS
Mudassir Ali Sayyed
Chemnitz University of Technology, Fraunhofer-Gesellschaft
Research areas: Engineering · Electrical and Electronic Engineering · Plasma Diagnostics and Applications · Fault Detection and Control Systems · Machine Learning in Materials Science
0000-0003-3397-3581
Employment
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TU Chemnitz Research Scientist2024 - Present
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Fraunhofer Society Research Scientist2023 - Present
Education
Education history is unavailable.
Projects & Funding
Projects & funding information is unavailable.
Publications (12)
- Virtual Metrology for Plasma Etching: A Two-Stage Framework for Sensor Data Compression and Prediction Save
- Virtual Metrology for Plasma Etching: A Structured Literature Dataset (2012–2025) Save
- Machine learning in chemical–mechanical planarization: A comprehensive review of trends, applications, and challenges Save
- A Multi-Model Dataset for BOSCH Plasma-Etching: Optical Emission Spectra, Process Parameters, and Wafer Measurements for Data-Driven Plasma Modeling Save
- Real-Time Interfacial Pressure Prediction in CMP Using Machine Learning Surrogates of Finite Element Simulations Save
- Hybrid Spectral Data Compression for Efficient and Interpretable Bosch Process Monitoring Save
- Machine Learning in Chemical-Mechanical Planarization: A Comprehensive Review of Trends, Applications, and Challenges Save
- About the Data Analysis of Optical Emission Spectra of Reactive Ion Etching Processes—The Method of Spectral Redundancy Reduction Save
- Real-Time End Point Detection via Automated Dynamic Mode Decomposition Save
- Physics Guided Generative Learning for Domain Adaptable Data Synthesis : Progressive Fault Synthesization for Predictive Machine Maintenance Save
- Abstracts of the 57th Annual Meeting of the German Society of Biomedical Engineering 26 – 28 September 2023, Duisburg, including: The Artificial Vision Symposium – The International Symposium on Visual Prosthetics Save
- Towards knowledge-enhanced process models for semiconductor fabrication Save