Roberto Dailey

Employment

• The University of Texas at Austin

Education

Education history is unavailable.

Projects & Funding

Projects & funding information is unavailable.

Publications (3)

• Uncertainty Aware Virtual Metrology (VM) Framework Enabling Optimized Physical Metrology Policy and VM Model Adaptations
  IEEE Transactions on Semiconductor Manufacturing 2026 DOI: 10.1109/TSM.2026.3709162
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• Dynamic decision-making on the number and selection of measurement markers for stochastic control of overlay errors in photolithography
  CIRP Journal of Manufacturing Science and Technology 2025 DOI: 10.1016/j.cirpj.2025.09.008
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• Virtual Metrology of Critical Dimensions in Plasma Etch Processes Using Entire Optical Emission Spectrum
  IEEE Transactions on Semiconductor Manufacturing 2024 DOI: 10.1109/TSM.2024.3416844
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